
SILICON CARBIDE INGOT, SILICON CARBIDE SUBSTRATE,
200765- 9. The method for manufacturing a silicon carbide ingot according to claim 8, wherein at least one of each sides of said quadrilateral or c
200765- 9. The method for manufacturing a silicon carbide ingot according to claim 8, wherein at least one of each sides of said quadrilateral or c
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[11] Patent Number: [45] Date of Patent: 5,746,827 May s, 1998 [54] METHOD OF PRODUCING LARGE DIAMETER SILICON CARBIDE CRYSTALS [75] Inventors:
square polycrystalline silicon carbide (SiC) ingots into 40 pieces at once.- The non-contact, thermal process-wire electrical discharge method slices
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2012515-Provided is a monocrystalline silicon carbide ingot containing a dopant element, wherein a maximum concentration of the dopant element is le
This invention relates to a method for the manufacture of monolithic ingot of silicon carbide comprising: i) introducing a mixture comprising polysilicon
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Silicon carbide inclusions in multicrystalline (polycrystalline) silicon ingots affect the cutting process and quality of silicon wafers. The higher density
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Provided is a monocrystalline silicon carbide ingot containing a dopant element, wherein a maximum concentration of the dopant element is less than 5×10
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201326-prototype multi-wire electrical discharge processing technology to cut very hard 4 inch square polycrystalline silicon carbide (SiC) ingots
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